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net income totaled $21.5 million , equal to $0.68 per share (diluted), compared to net income of $28.8 million , equal to $0.94 per share (diluted) in the first quarter of 2011 and net income of $12.5 million , equal to $0.40 per share (diluted), in
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Surfscan® family of wafer defect and surface quality inspection systems: the Surfscan SP3. As the first unpatterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination, the Surfscan SP3 systems feature dramatic advances in
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