EV Group Unveils Its Next-Generation EVG150 Automated Resist Processing Platform For High-Volume Coating/Developing Applications
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EV Group Unveils Its Next-Generation EVG150 Automated Resist Processing Platform For High-Volume Coating/Developing Applications

Taipei : Taiwan | Sep 04, 2012 at 6:11 AM PDT
Source: PR Newswire
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EVG150 automated resist processing system .  The high-volume coater/developer has been completely redesigned to provide customers with a flexible, modular platform that integrates spin coating and developing with EVG's advanced, proprietary spray coating technology. (Photo: http://photos.prnewswire.com/prnh/20120904/SF67114... FULL ARTICLE AT PR Newswire
 
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